R2D Automation Comet 2 Station
R2D Automation Comet 2 Station
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Available quantity: 1
Description
Comet 2 station 1186
Wafer transfer System
The machine is currently set up for 6“
Using the COMET 2 STATION is the easiest way to transfer batch of wafers 3″ to 12″, from cassette to cassette or from cassette to boat. The batch can contain from 1 to 25 wafers to be transferred.
Simple to use and easy to maintain, the COMET 2 STATION is set up and controlled directly from the front panel keyboard. All electronic parts are compatible for all COMET machines.
The COMET 2 STATION is also compatible with SECS-GEM communication, SECSI or HSMS protocol, thanks to its R2S232 and TCP/IP communication port available on the rear side of the machine.
Peek material for pushers, retainers and boat adaptors
LCD display indicating all cycle steps.
IR heat sensor
Double cassette/boat sensors
Carrier correctly positioned (mechanical)
Wafer presence detection into cassette/boat
Current limit on all motors
Power “off” security
Open frame, designed for a vertical laminar flow
Automatic home position
Historical data recorded (error messages data time)
Clean room colour paper documentation
Specifications
Manufacturer | R2D Automation |
Model | Comet 2 Station |
Condition | Used |
Stock Number | BM197 |