2007 SSE Maximus 804
2007 SSE Maximus 804
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Description
Configuration:
Wafersize: currently set up for 8"
Coater: Open Bowl, 1 Dispense Arm
Backside Rinse (BSR) , Edge Bead Removal (EBR), 3 Dispense
Developer
Wafersize: currently set up for 8"
1 Dispense Arm with 2 Developer Lines, 1 DI Water Line, 1 N2 purge line, Backside Rinse (BSR)
Hotplates 3 units
Temperature up to 250 Degree Celsius
Lifting Pins stepper motor driven
HMDS Hotplate 1 Unit
Coolplates 3 Units
Lifting Pins stepper motor driven
Isel Roboter
2 Cassettes
Specifications
Manufacturer | SSE |
Model | Maximus 804 |
Year | 2007 |
Condition | Used |
Stock Number | TARA-093 |