LAM TCP 9600SE

Metal Etch

Etch/Ash/Clean - Plasma Processing

Currently Configured for: 150mm

Install TypeThrough-the-wall

Software TypeLam Envision

Software VersionE 1.5.2

Is System On-Line?No

CE Mark Certified?No

SECS InterfaceYes 

Electrical Requirements208V/80A

OEM Audit Available? No

Decontamination Report Exists?No

Can Produce Wafers AS IS?Yes  

Any Known Field Modifications?No

All Cables Present?Yes  

Gas Panel TypeStandard 

Etcher Mainframe Type Stand AloneX

PM 1 / Main ChamberMetal Etch

Key Stand Alone Mainframe Items  

Equipe AutoloaderNo

Built-In Hepa FilterNo

Orbitally Welded Gas BoxYes  

Backside Helium CoolingYes    

Helium Cooling MFC TypeUNIT UPC8130

Heated Pumping ManifoldsYes 

On-Board RF GeneratorsYes 

Remote RF Cart No

Remote Gas BoxNo

Main On-Board AC Distribution TypeFused  

Remote AC BoxNo

WVDS Yes  

DSQ TypeHinged 

Hine 38A IndexersYes 

Endpoint Detection SystemYes 

Endpoint TypeMonochromators

Endpoint Lam Part Number830-330546-001

Chamber Liner PresentYes 

Chamber Anodization ConditionGood

Electrode Gap Fixed Gap

Wafer ClampESC 

ESC TypePolyamid

Gate Valve Mfg, Model/TypePendulum

TCP Coil Size6”  

Chiller Information 

ManufacturerEdwards

Model

TCU40/80

Electrical Requirements200/208VAC/ 25A

# of Cooling ChannelsOne  

Quantity Required1

Included With SystemYes  

Gas Line # Gas Flow (sccm)MFC Mfgr. MFC Model

1Cl2 100UNIT 1660

2BCl3 100UNIT1660 1660

3SF6 100UNIT 1661

4N2 20UNIT 1660

5O2 500UNIT 1660

6Ar 100UNIT 1660

7O2 1200UNIT 1660

8CF4 100UNIT 1660