LAM TCP 9600SE

Metal Etch

Etch/Ash/Clean - Plasma Processing

Currently Configured for: 150mm

Install TypeStand Alone

Software VersionPLC & M2I

System ControllerPLC & TOP VIEWER

System

LEAD Model NumberVULCAN-V61MD

Process NameSiC_GOX

Customer Process NameSiC_GOX

Temperature Range700~1250 degree 

General Configuration

Front Surface FinishWhite / SS

System Layout TypeU/Box Type / 

Process PressureAtmospheric

Heater TypeVN-V81MDP-2005-1400

Number of Zones5 Zones

Temperature Controller ModelEUROTHERM MINI-16LP

Wafer Handling

Wafer Handler Type5 Forks

Fork MaterialCERAMIC

Stocker21 Carrier 

Batch/Load Size150wfs

Gas Panel Configuration

MFC Type 

Pressure Display Units 

GasMFC ModelMFC Size

N2SEC-Z512MGX30slm

O2SEC-Z512MGX20slm

O2SEC-Z512MGX500sccm

H2SEC-Z512MGX10slm

N2OSEC-Z512MGX10slm

N2SEC-Z512MGX100sccm

ArSEC-Z512MGX10slm

NOSEC-Z512MGX10slm

N2SEF-Z512MGX2slm

UPSExternal