Semitool OEM Semsysco SST 531 280 50Wafer

Automated wet processing Tool

-Vintage 2012

-Voltage 3x400V+N+PE 35A max

-Dimension 2100x1087x1867mm LxWxH

-3 Hetated, 2 Unheated Tanks

-280er Chamber for 50 Wafers 8“

-Tank 1,2 was used for EKC 265, Tank 3,4 for IPA

-Additional tank Nb. 5 for tests, equipped with a

Fillvessel and Metering pump. T5 Supply by external

CDA cabinet.

-2xFume Sensors Bieler+Lang

-5x Levitronix Pumps BSM 4.2 + LC325

-Rotor 50 Wafer for Clampshell

-SECS GEM