2016 Plasmatherm Versaline ICP Dry Etching System

2016 Plasmatherm Versaline ICP Dry Etching System

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Description

There are 2 systems available



Modules for Machine 1438 Vintage 2016:


  • Versaline ICP LM / TM
  • Hine Automation HA-600 Vacuum Front end system
  • Versaline ICP PM #4
  • Versaline ICP PM #3


Modules for Machine 896 Vintage 2014:


  • Versaline VCX-600 LM/TM, Hine HA-600
  • Versaline ICP PM #3
  • Versaline VCX-600 PM #2
  • Versaline ICP PM #1


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Specifications

ManufacturerPlasmatherm
ModelVersaline ICP Dry Etching System
Year2016
ConditionUsed
Stock NumberGOD23082023720223616