1996 Nikon i11D
1996 Nikon i11D
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Description
-i-Line stepper
-Reticle: 6”
-Lamp power: 585 mW/cm2 Uniformity: 1.00%
-TFD: 0.396 μm
-Astigmatism: 0.264 μm
-Stepping 3 sigma: X:20nm, Y:21nm
-1996 vintage
Specifications
| Manufacturer | Nikon |
| Model | i11D |
| Year | 1996 |
| Condition | Used |
| Stock Number | BM6833 |