AMAT Producer GT Eterna FCVD

ECVD (Chemical Vapor Deposition)

Deposition Equipment

Currently Configured for: 300mm

Asset HDD not included

Tool has been de-installed and s stored in an off-site warehouse.

Shipping brackets and kits will need to be supplied by buyer.

A HARD DISK DRIVE IS NOT INCLUDED IN TOOL.

Other Missing or damaged parts: Not reported.

[Chamber A]

Chamber Type:Eterna

Gas Config(sccm)=MFC Full Scale

NH3(1000)/TSA(1000)/H2O(1000)/NH3(1000)/Ar(10000)/He(5000)/O2(250)/Ar(5000)/O2(2500)

RF HF 13.56MHz, max 3kW

[Chamber B]

Chamber type:UV Cure

Gas config. (sccm)=MFC full scale 

NF3(5000)/Ar(5000)Ar(35000)/Ar(2000)/Ar(10000)/O3(30000)

Remote plasma 400kHz,max 10kW

[Chamber C]

Chamber Type:Eterna

Gas Config(sccm)=MFC Full Scale

NH3(1000)/TSA(1000)/H2O(1000)/NH3(1000)/Ar(10000)/He(5000)/O2(250)/Ar(5000)/O2(2500)

RF HF 13.56MHz, max 3kW