2004 AMAT Reflexion LK - Poly/STI

Poly/STI CMP

CMP Equipment

Currently Configured for: 300mm

Asset HDD not included

Section 1. Tool General Information

Micron MISTI/LID #   CMP7019

Vendor Tool Serial #   405313

Month / Year of Tool Move In   6/1/2004

Tool Current Status  De-installed

Tool working condition   Not working with missing parts

Section 2. Move-out constraint Any layout/move-out path constraint No

Software Version (include revision #) Ip3B4.8_52

System Power Rating  208v 3 Ø 60Hz

Loading Configuration  3 load ports (TDK)

System Configuration    Description    Tool: AMAT Reflexion LK    

Process Unit: Polisher  

Model: Reflexion LK 

Controller: eServer    

MFC/Pressure Unit:     

Drive Mechanisms: Mechanical / Pneumatic

FOUP Opener: Pneumatic    

Gas System: CDA / HPN2    

Exhaust System: Acid / Solvent

1 Polisher - 3 platens   

2 Polisher - 4 carriers (5-Zone Contour)  

3 Polisher - 8 UPAs (G4+)   

4 Polisher - P1 slurry controllers: 20-200ml/min (x2); 50-500ml/min (x2) 

5 Polisher - P2 slurry controllers: 20-200ml/min (x3)  

6 Polisher - P3 slurry controllers: 20-200ml/min (x2); 50-500ml/min (x1) 

7 Cleaner - Running Beam   

8 Cleaner - Input, Buffer, Megasonics, Brush Box 1, Brush Box 2, Dryer (Desica - Marangoni)

List of the missing and defective items:

FI Robot Controller

iAPC Server

Head Driver Box

Polisher DC Power Supply Assembly (AMAT; 0010-63313)

Cross Rotation Driver (AMAT; 1080-00262)

FI Robot

FI Fan Assembly

Platen Motor and Gearbox (7:1)

Cleaner FFU

• eServer HDD
• FI non-integrated computer
• Solenoid assy from pneumatics assy