2005 SSEC/ Veeco ML 3300

2005 SSEC/ Veeco ML 3300

Contact us for price

orCall +353 (0) 87 192 1110

Description

Single wafer cleaning system

8"

Vintage 2005


WaferStorm Wet Processing Platform

The WaferStorm platform is the industry choice for a number of critical solvent-based processes in the advanced packaging, MEMs, RF, Data Storage and Photonics markets.

The ML 3300 system is well suited for R&D and pilot environment


Chemicals used H2O2 / HF and H3PO4

 

And carries 4 tanks.

 

Tank 1 Hydrogen Peroxide

Tank 2 Al or Cu Etch A

Tank 3 Hydroflouric ACID (10:1)

Tank 4 Al or Cu Etch B

 

There is a connection for external heat exchanger.




Specifications

ManufacturerSSEC/ Veeco
ModelML 3300
Year2005
ConditionUsed
Stock NumberBM2253