2005 SSEC/ Veeco ML 3300
2005 SSEC/ Veeco ML 3300
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Description
Single wafer cleaning system
8"
Vintage 2005
WaferStorm Wet Processing Platform
The WaferStorm platform is the industry choice for a number of critical solvent-based processes in the advanced packaging, MEMs, RF, Data Storage and Photonics markets.
The ML 3300 system is well suited for R&D and pilot environment
Chemicals used H2O2 / HF and H3PO4
And carries 4 tanks.
Tank 1 Hydrogen Peroxide
Tank 2 Al or Cu Etch A
Tank 3 Hydroflouric ACID (10:1)
Tank 4 Al or Cu Etch B
There is a connection for external heat exchanger.
Specifications
Manufacturer | SSEC/ Veeco |
Model | ML 3300 |
Year | 2005 |
Condition | Used |
Stock Number | BM2253 |