2008 KLA-Tencor EDR 5200 SEM
2008 KLA-Tencor EDR 5200 SEM
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Description
Tool Status Disconnected
Wafer Size 300 mm
Fab Section Metrology
Model EDR 5200
Vintage 2008
Asset Description NA
Software Version Window
CIM Linked
Process Defect Review
Hardware Configuration (fab):
Main System Main Tool 1
Handler System Wafer Transfer Robot 1
Handler System Loadport 2
Specifications
Manufacturer | KLA-Tencor |
Model | EDR 5200 SEM |
Year | 2008 |
Condition | Used |
Stock Number | BM2573 |