KLA-TENCOR P-10 (Upgraded to P-15) Surface Profiler

- Model: Previously a P-10, upgraded with XP upgrade package to convert to a P-15

- Manual wafer load profilometer

- Max wafer size: 8"/200mm

- Windows XP Computer controlled with USB ports

- Measures surface roughness, micro-waviness, step height, and other surface characteristics

- Up to 200mm scan length

- Microhead II LF with programmable force: 

       - Max Step Height ~131μm 

       - Stylus force 0.5 - 50 mg 

       - 6.5 μm step height, resolution < 0.05 Å 

       - 26 μm step height, resolution < 2.0 Å

       - 130 μm step height, resolution < 10.0 Å

- Top and Side View Optics

- 2D Stress Analysis Option to compare pre- and post-processing traces.  

- Stress plate for up to 3" wafers

- Measures micro-roughness with up to 0.5Å (0.002 min.) resolution over short distances as well as waviness over a full, 200-mm scan.

- Brand new stylus

- Brand new LCD monitor

- Operations Manual

- Refurbished to Meet Original KLA-Tencor P-15 Specifications

- Measurement of vertical features ranging from under 100Å (0.4 min.) to approximately 131 µm, with a vertical resolution of 0.05, 2, or 10Å.

- A virtually unlimited number of data points per profile guarantee that the horizontal resolution is limited by the stylus radius and not by the number of data points.

- Measurement of many roughness and waviness parameters, with user-selectable cutoff filters to isolate roughness and waviness.

- Ability to fit and level a scan, allowing accurate step height measurements on curved surfaces.

- Ability to detect the edge or apex of a profile feature, allowing automated data analysis relative to the feature.

- Ability to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements.