LAM 4420

LAM 4420

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The LAM 4420 is 90% refurbished and has multiple upgrades and has all options like onboard RF and Envision software. It is a demo tool. Please contact us for further information. Configuration: Tool Model : 4420 Dual LCD monitor upgrade Power supply upgrade Pneumatic upgrade Bulkhead system mount w/tunnel covers Hine 38A open casseNe Send/Receive indexers SoQware Version: Envision Poly etcher, 8” 4,5 and 6 inch optional Clamp type/ ESC optional RF onboard AE RFDS 1250 waN RF generator Chiller Unit Neslab AC Rack AC Power Distribution Moving gap Back Helium Colling Main Power 208V, 3 Phase, 5Wire, 175A, 60/ Hine 38A open cassePe Send/Receive indexers Belt driven load station Standard load station shuttle spatula Upper chamber gap drive encoder Dip PCB for RF power tuning Aluminum upper chamber electrode Single lower chamber endpoint detector (405/520nm) Non-­?-­?-­?heated endpoint window Low pressure chamber manifold HPS valve for chamber isolation AC-­?-­?-­?2 chamber pressure control Lower chamber RGA port VCI lower mini-­?-­?-­?match Millipore CMHT-­?-­?-­?11S02 10 Torr chamber manometer Millipore CMLA-­?-­?-­?21 100 Torr backside helium manometer Tylan General CMHT-­?-­?-­?11S02 10 Torr reference manometer 8 -­?-­?-­? Gas box Orbital gas box Gas 1: To customer Spec Gas 2: To customer Spec Gas 3: To customer Spec Gas 4: To customer Spec Gas 5: To customer Spec Gas 6: To customer Spec Gas 7: To customer Spec Gas 8: To customer Spec UPC: He (50 sccm) -­?-­?-­? Unit 1300 AC input box for AC power inlet Trip breakers AC/DC power box


Stock NumberGOD23122019
Wafer Size200MM