Rudolph Metapulse 300 Film Thickness Measurment System

Rudolph Metapulse 300 Film Thickness Measurment System

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Description

Currently configured for 300mm Install Type Stand-alone Cassette Interface: Two brooks Fixload -6  300mm Foup Load Ports, 25 Slot Foups Pre-Aligner ( Flat/ Notch finder) Status Lamp R/Y/G/B Ultrafast Laser output (TI Sapphire):800nm@300mW, PW=100x10e-15sec Diode pump laser power :2W GEM/SECS 11 3.5 inch Floppy CD-RW Drive 2 GB Jazz Drive Backup Chiller unit: Lytron RC006G03B2C015 Power requirments:220VAC (4900VA), single phase Freq 40/60Hz

Specifications

ManufacturerRudolph
ModelMetapulse 300
Year2003
ConditionUsed
Stock NumberC05052015