GSI ULTRADEP 1000 PVD System

GSI ULTRADEP 1000 PVD System
$20,000 ex works
Available quantity: 1
orCall +353(0)87 1921110
Description
GSI ULTRADEP 1000 PVD System For sale is a GSI PVD Ultradep 1000 which is Used and in very good condition. Contact ollie@tarasemi.com for more information. Recipe driven automated controls SiO2 and Si3N4 films, amorphous Si 8” wafer capability Specifications : SiO2 rates: Lo@1000 angs./min. Hi@3000 angs./min Si3N4 rate: 350 angs./min. Alpha Si rate: (currently unavailable) Gases: SiH4 5%/He bal., N2, O2, N2O, He
A separate Gas panel which was used with this system will also be included,
See photo's for details
Specifications
Manufacturer | GSI |
Model | ULTRADEP 1000 |
Condition | Used |
Stock Number | TARA-090 |