TEL ACT 12 1C2D Single Block Resist Coater Developer

TEL ACT 12 1C2D Single Block Resist Coater Developer
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Description
TEL ACT 12
Single Block
Resist coater developer
Vintage 2003
Configuration:
• 1C/2D
• Resist Reduction: NONE
• Dev Nozzle: H NOZZLE
• Resist pump: ENCOMPASS
• Hot Plates: CHP x3, CPL x2
• Chemicals: Resist supply: Gallon bottle, Thinner: OK73
• PCT Pump is Encompass of Entegris.
• BLOCK DIAGRAM: below
Notes:
Tool is operating in clean room.
Buyer will be responsible for arranging disassembly and rigging for tool.
Hard drive Removed before hand over
No missing parts
The tool has system and driver issues
Specifications
Manufacturer | TEL |
Model | ACT 12 |
Year | 2003 |
Condition | Used |
Stock Number | GOD2905202012 |
WAFER SIZE | 300mm |