TEL ACT 12 1C2D Single Block Resist Coater Developer

TEL ACT 12 1C2D Single Block Resist Coater Developer

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Description

TEL ACT 12 Single Block Resist coater developer Vintage 2003 Configuration: • 1C/2D • Resist Reduction: NONE • Dev Nozzle: H NOZZLE • Resist pump: ENCOMPASS • Hot Plates: CHP x3, CPL x2 • Chemicals: Resist supply: Gallon bottle, Thinner: OK73 • PCT Pump is Encompass of Entegris. • BLOCK DIAGRAM: below Notes: Tool is operating in clean room. Buyer will be responsible for arranging disassembly and rigging for tool. Hard drive Removed before hand over No missing parts The tool has system and driver issues

Specifications

ManufacturerTEL
ModelACT 12
Year2003
ConditionUsed
Stock NumberGOD2905202012
WAFER SIZE300mm