2011 ASM A412 Dual Reactor

2011 ASM A412 Dual Reactor

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Description

ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN

Twin LPCVD As Doped Reactors


Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

Specifications

ManufacturerASM
ModelA412 Dual Reactor
Year2011
ConditionUsed
Stock Numberem022
WAFER SIZE300mm