Tel Lithius Pro I

Tel Lithius Pro I

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Description

Load Module

- Load Port: TEL Standard x4

- Loader arm: TEL Standard x1

Transfer Module

- Transfer Arm (Robot): TEL Standard x7

Process Module

-Chamber: Soft Bake x12, PEB x4, Hard Bake x4, ADH x4, COT: x3, BCT: x3

ITC: x3, DEV: x6, WEE: x2, BST: x3, PIR: x2

Specifications

ManufacturerTel
ModelLithius Pro I
Year2012
ConditionUsed
Stock NumberEM332