1999 AMAT CENTURA ULTIMA TE

Available quantity: 1

orCall +353 (0) 87 192 1110

Description

AMAT CENTURA ULTIMA TE


See attached document for gas panel and system controller data.


Mainframe type: Centura Phase 2

L/L type: Narrow Body

Wafer mapping: FWM

Xfer Robot: HP

Wafer On Blade Sensor: Yes

OTF: Yes


Ch-A: ULTIMA TE

Cleaning type: RPS (MKS: ASTRONi AX7670-19)

Turbo pump: BOC Edwards:STP-XH2603P

Generator Rack Type: ENI Rack

Top Generator: ENI NOVA-50

Side Generator: ENI NOVA-50

Bias Generator: ENI GHW-50


Ch-B: ULTIMA TE

Cleaning type: RPS (MKS: ASTRONi AX7670-19)

Turbo pump: BOC Edwards:STP-XH2603P

Generator Rack Type: ENI Rack

Top Generator: ENI NOVA-50

Side Generator: ENI NOVA-50

Bias Generator: ENI GHW-50


Ch-C: NA

Ch-D: NA

Ch-E: MS-Cool


5 Phase motor driver: Xfer x2, L/L x2, Ch-E x1 Voltage: 200V 3φΔ 50/60Hz

Sub system

Chiller: SMC INR-498-0018

Ch-F: Orientor

Specifications

ManufacturerAMAT
ModelCENTURA ULTIMA TE
Year1999
ConditionUsed
Stock NumberEM330