2001 LAM Research Alliance Exelan HPT Chamber

2001 LAM Research Alliance Exelan HPT Chamber

Available quantity: 2

orCall +353 (0) 87 192 1110

Description

LAM Research Alliance Exelan HPT Chamber



First Camber of two:


Vintage 2001

200mm

Pressure gauge: 685-097707-002

Gate valve: VAT98801-R1

Gate valve controller: VAT VM-6

Turbo pump: STP-A1603C

Turbo pump controller: SCU-A1604C

Bias RF Generator: OB1-R03

Main Power: 208VAC 50A 50-60Hz 4wire

Missing Parts (As far as we know): Gas Box all MFC’s



Second Chamber of Two:


Vintage 2001

200mm

Pressure gauge: 685-097707-002

Gate valve: VAT98801-R1

Gate valve controller: VAT VM-6

Turbo pump: STP-A1603C

Turbo pump controller: SCU-A1604C

Bias RF Generator: OB1-R03

Main Power: 208VAC 50A 50-60Hz 4wire

Missing Parts (As far as we know): Gas Box all MFC’s



Specifications

ManufacturerLAM Research
ModelAlliance Exelan HPT Chamber
Year2001
ConditionUsed
Stock NumberEM344
WAFER SIZE8