2005 NIKON NSR-SF130 i-Line Stepper

2005 NIKON NSR-SF130 i-Line Stepper

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Description

See the document attached for more data and pictrures


  • Throughput Step (1) FIA-EGA 120wafer/hour or more

(2) LSA-EGA 96wafer/hour or more

  • Alignment accuracy: 35nm or less (M+ 3σ)
  • Lighting: Three equipped with Squeezing

(1) NA:0.43 CONV

(2) NA:0.36 CONV (3) I-NA:0.50 2/3Ann

  • VRA angle, exposure range(Scan Field): Two Type 26×33mm, 25×33mm
  • Options: PPD Pellicle on particle inspection device, 2D barcode ,WL front In-line),

Relay FOUP unit



Specifications

ManufacturerNIKON
ModelNSR-SF130
Year2005
ConditionUsed
Stock Numberem371
WAFER SIZE12
* Typei-Line Stepper
* Wavelength365nm
* Surface illumination (standard)1000[mW/cm2]or more
* Reduction ratio1:4
* Resolution280nm or less
* LightingThree equipped with Squeezing
* Wafer alignmentFIA/LSA
* LC controlAdjust only 25×33mm
* Reticle BufferMax 14sheet
* Projection lens NAVariable 0.50~0.62