2020 Edwards Auto 500

Edwards Auto 500 electron beam evaporator with Mbraun Labmaster glovebox- Rebuilt

Rebuild completed June, 2020

Edwards Auto 306 electron beam evaporator with additional thermal source

Mbraun 2 port glovebox with antechamber and single bed purifier (Optional: oxygen and moisture monitoring for drybox)

Stainless bell jar with Festo pneumatic/magnetically coupled hoist and viewing window

All hardware including water cooled feedthroughs installed for thermal source to be added.

Edwards XDS10 6.5CFM scroll pump

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Electron Beam Source:

Edwards EB3 4-pocket multi-hearth electron beam gun

Edwards EB3 XY sweep control

Edwards EB3 turret control

Kurt Lesker FTC-2800 multi layer deposition controller

MDC e-Vap CVS-6 6kW electron beam power supply

MDC E-vap controller

MDC EV-FT-12B-CE ebeam filament transformer

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New CHA high voltage feedthroughs for filament holder installed

Electron beam gun rebuilt and all components chemically cleaned

Functional test of all high vacuum components to 10-6

Functional test of all deposition components

New Leybold 450 turbo pump and controller installed

Kurt Lesker FTC-2800 film thickness deposition controller installed