Edwards EPX180LE

Edwards EPX180LE

EQUIPMENT DETAILS:

Tool Status: Pump has been powered down, deinstalled, and moved to the warehouse.

Configuration. Audit to verify Pump has not been refurbished and is not skidded or crated.

Technology Specification : Peak speed : 3000 l/min Ultimate vacuum : <7 x 10-5 torr

Typical nitrogen consumption : 0 SLM

Inlet/outlet connection : ISO63/NW25

Noise : 56 dB

Cooling water consumption : 120 l/h

Weight : 45 kg

Power to Ultimate : 1.4 kW