2004 Canon Surpass 320

2004 Canon Surpass 320

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Available quantity: 2

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Description

Canon Surpass 320 Stripper/Asher

Currently Configured for 300mm wafer size

MFG Date: September, 2004

EQUIPMENT DETAILS:

Tool is operating in clean room.

Shipping brackets and kits will need to be supplied by buyer.

Buyer is responsible for arranging disassembly and rigging for tool.

A HARD DISK DRIVE WILL BE REMOVED.

[Chamber A]

Chamber type:Asher

Gas config. (sccm)=MFC full scale

H2/N2(2000),O2(5000)

MW 2.45GHz, max 5000W

Stage Material:Ceramic

Stage Heater max 300C

Dielectric Substance:Al + Al2O3

[Chamber B]

Chamber type:Asher

Gas config. (sccm)=MFC full scale

H2/N2(2000),O2(5000)

MW 2.45GHz, max 5000W

Stage Material:Ceramic

Stage Heater max 300C

Dielectric Substance:Al + Al2O3

Specifications

ManufacturerCanon
ModelSurpass 320
Year2004
ConditionUsed
Stock Numberem1176
WAFER SIZE300mm