AMEC Primo SSC AD-RIE

orCall +353 (0) 87 192 1110

Description

AMEC Primo SSC AD-RIIE

Dielectric Etch

Currently Configured for 300mm wafer size

EQUIPMENT DETAILS:

1. Primo Dielectric Adv Etch System 4 CH

2. System

1. Platform - Primo ES

2. Chamber A1 : SSC AD-RIE

3. Chamber A2 : SSC AD-RIE

4. Chamber C1 : SSC AD-RIE

5. Chamber C2 : SSC AD-RIE

3. Additional Items

1. 60MHz 3KW Pulsing SRF

2. 2 MHz 11KW Pulsing BRF

3. Cool Focus Ring Kits

4. OHGB Gas Delivery

Specifications

ManufacturerAMEC
ModelPrimo SSC AD-RIE
ConditionUsed
Stock NumberEM1184
WAFER SIZE300MM