2007 ASM International A412 Doped Poly

orCall +353 (0) 87 192 1110

Description

ASM International A412 Doped Poly Vertical LPCVD Furnace

Currently Configured for 300mm wafer size

MFG Date: 2007

EQUIPMENT DETAILS:

Process: POLY

Tool config is based on original PO, please verify tool details at tool inspection

Tool & Auxillary Settings

Software version: 6.80C

Heater Type: MRL

Loader configuration, 4 or 5 loader: 4

Quartzware Configuration

Outer tube: Quartz

Inner tube: Quartz

Boat: SiC boat

Boat fix ring/Cap quartz: Quartz

Adiabatic plate quantity: 6

Back N2, Qty: N/A

BCl3, Qty & Type (L-type, Straight, Diffuser, Shower): N/A

SiH4, Qty & Type (L-type, Straight, Diffuser, Shower): Multihole (1) U/D/L

O2, Qty & Type (L-type, Straight, Diffuser, Shower): Multihole (1) E

PH3, Qty & Type (L-type, Straight, Diffuser, Shower): Multihole (1) U/D/L

ClF3, Qty & Type (L-type, Straight, Diffuser, Shower): N/A

Design: original config

10 Torr Baratron model: MKS

10 Torr Baratron full scale setting: 10(F/S)

1000 Torr Baratron model: MKS

1000 Torr Baratron full scale setting: 1000(F/S)

ATM sensor model: MKS

Vent Valve 1 (VV1) normally closed/open,plunger, diaphragm: Normally open,plunger

Check valve model: Fujikin

Check valve resistance pressure: 2.26 Kpa

Mainvalve type, Kitz or CKD: MKS

Slow valve, incorporated with mainvalve or separate(AV72,AV77): Separate (PV003)

Slow valve orifice size: 2.0mm (PV003)

Pressure range of vacuum gauge(Inficon Pirani gauge): 10T

Control Table

Temp (Low Alarm Limit(deg)/High Alarm Limit(deg)/Check Time(min)):

U: 0.7/0.7/30S

CU: 0.7/0.7/30S

C: 0.7/0.7/30S

CL: 0.7/0.7/30S

L: 0.7/0.7/30S

Pressure (Low Alarm Limit(Torr)/High Alarm Limit(Torr)/Check Time(S)): 0.02/0.02/30S

MFC (Low Alarm Limit(%)/High Alarm Limit(%)/Check Time(S)):

MFC1: N2: 2%/2%/10sec

MFC2: N2: 2%/2%/10sec

MFC3: N2: 2%/2%/10sec

MFC4: N2: 2%/2%/10sec

MFC5: SiH4: 2%/2%/10sec

MFC6: SiH4: 2%/2%/10sec

MFC7: SiH4: 2%/2%/10sec

MFC8: 1%O2/Ar: 1%/1%/10sec

MFC9: 5%PH3/N2: 2%/2%/10sec

MFC10: 5%PH3/N2: 2%/2%/10sec

MFC11: 5%PH3/N2: 2%/2%/10sec

MFC12: ClF3: 10%/10%/10sec

MFC13: N/A

MFC14: N/A

MFC15: N/A

MFC16: N/A

MFC17: N/A

MFC18: N/A

MFC19: N/A

MFC20: N/A

MFC21: N/A

APC Valve Action (High (%), Low (%), Time(s)): N/A

Transfer Table

Side Dummy: Upper:5 / Lower:10

Product: 100

Monitor: 5

Product & Monitor: 105

2nd charge time(min): 0

wafer cool time(min): 20min

Leak Rate Table

Base pressure low Limit(Torr): 1%

Base pressure High Limit(Torr): 1%

Leak Check check time(s): 60s

Leak Check delay time(s): N/A

Leak limit(Torr): 1%

Retry Limit(count): 2

Loadlock Settings

Loadlock configuration

O2 analyser model, NGK or Toray: PBI3.1 / PBI4.0

Process:

L/A Keep Value (ppm): 10ppm

N2 Flow max (L): 1300L

N2 Flow min (L): 300L

Check Stability Time(s): N/A

L/A Keep Value (ppm): 10ppm

N2 Flow max (L): 1300L

N2 Flow min (L): 300L

Check Stability Time(s): N/A

Idle:

L/A Keep Value (ppm): 10ppm

N2 Flow max (L): 1300L

N2 Flow min (L): 300L

Check Stability Time(s): N/A

L/A O2 check time (min): N/A

L/A O2 limit (ppm): 10ppm

POD opener O2 limit (ppm): N/A

POD O2 check time(min): N/A

POD check retry : N/A

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Specifications

ManufacturerASM International
ModelA412 Doped Poly
Year2007
ConditionUsed
Stock Numberem1187
WAFER SIZE300mm