2010 Novellus Systems Inc. VECTOR Express

2010 Novellus Systems Inc. VECTOR Express
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Description
Novellus Systems Inc. VECTOR Express
PECVD (Chemical Vapor Deposition)
Currently Configured for 300mm wafer size
MFG Date: 2010
EQUIPMENT DETAILS:
Process: CVD
Tool config is based on original PO, please verify tool details at tool inspection
Basic System
Platform type: Vector Express
Chamber type: TEOS AMP-DS
Process capability: TEOS oxide
Loadport count: 2load port(Brooks)
Chm Position 1: Express
Chemicals/Gases Used: Chemical: TEOS. Gas:Ar/N/O2/He/NF3
Required Software Revisions
"System software: 6.07B93
Windows 2000"
Fixload firmware: Rev 1.05
ATM robot firmware (friction end effector): WAVE2, 1.0T CF2.BA with Friction End
Effector) 75-294243-00
Vacuum robot firmware: NA
Hardware Configuration - Frame
FOUP front end interface: 63-352409-00
Fixload FOUP RFID reader: 6M Hermos (2 FOUP)(integrated into Fixport) 63-292227-02
ATM robot end effector (friction type): 02-273860-03
Loadlock motion controller: 04-322903-00 V 2.80
Loadlock to atmosphere valve (VAT L-motion): 60-123331-00
Loadlock to chamber valve (SMC valve): 63-335469-00(XGT300-30-1A-X1 REV A.) Bonded
Gate Valve
Front UI computer: 63-269347-00
Transfer module robot: NA
Transfer robot end effector: NA
Transfer module SMC valve: NA
Transfer module SMC valve gate: NA
Loadlock lift pin servomotor: Motor, Smart, Lift, Express, 33-289141-00
Transfer chamber throttle valve: NA
Loadlock vacuum gate valve: NA
"Loadlock pump isolation valve: 60-266065-00
Valve, Angle, KF25, Pneu, High Speed"
Mini environment AWC: installed
Loadlock baratrom: MKS 750B12TCE2GK - 10 Torr; 27-126062-00
Transfer module baratron: NA
FFU filter: none
Hardware Configuration - Chamber
MPD EIOC2: ASSY; SIOC2 V5.00/5.3/B3 VECTOR, 02-321648-00
MACH IV EIOC0: ASSY; SIOC0 V5.00/5.3/B3 VECTOR, 02-321646-00
MACH IV EIOC1/E84/AWC: ASSY; SIOC1 V5.00/5.3/B3 VECTOR, 02-321647-00
MACH IV EC controller: NA
Showerhead assembly (13"): Showerhead; 13" RPC, 16-271392-00
Pedestal position 1 & 2: Pedestal; Novellium Pedestals for RPC/EXPRESS. Position 1. W/ Lift
Holes, 02-297112-00(only PED1)
Pedestal position 3 & 4: Pedestal; Novellium Pedestals for RPC/EXPRESS. Position 2,3,4. W/O
Lift Holes, 02-297113-00(PED2/3/4)
Captured lift pin assembly: 04-257354-00 (kit)
Remote plasma clean power supply: 27-261291-00 (GENERATOR,REACTIVE
GAS,400.0W,4L ASTRON)
HFRF generator: 3000 Watt HF RF Generator. RPC, 27-346755-00
"LFRF generator: 27-293721-00
GENERATOR,LF,2500.0W,PDX-2500,370-430KHZ"
"HFRF match network: RF MATCH,13.56MHZ,NAVIGATOR,SINGLE FREQ
27-296376-00"
"LFRF match network: RF MATCH,400 KHZ,FIXED,RESISTIVE+CAPACIT
27-359862-00"
"Servo spindle: 02-276537-00
Spindle Assy, Servo, Common(not water cooled)"
"Pendulum valve assembly (pressure control valve): 04-146459-00
KIT,HEATED PENDULUM VALVE,VCTR "
"AMPDS quad inlet & divert valves: TUBE ASSY,ALD QUAD VALVE
MNFLD,AMPDS,VXT
10-392789-00"
"AMPDS mechanical assembly: ASSY,VAPORIZER,MECHANICAL,1LIQ,ROUND,HDR,
02-368441-01"
Hot chamber hardware: yes
MCA sapphire balls: Ball, MCA Sapphire ball, 22-100613-00
Gas Panel (part#, gas species, size)
Line 1: 22-450167-00, He @ 20 SLM
Line 2: not used
Line 3: not used
Line 4: 22-450178-00, Ar @ 10 SLM
Line 5: 22-450165-00, N2 @ 10 SLM
Line 6: 22-450176-00, O2 @ 20 SLM
Line 7: 22-450178-00, Ar @ 10 SLM
Line 8: 22-450162-00, SiH4 @ 1.5 SLM
Line 9: 22-450179-00, CO2 @ 30 SLM
Line A: 22-450165-00, N2 @ 10 SLM
Line B: 22-450169-00, NH3 @ 10 SLM
Line C: 22-450174-00, NF3 @ 10 SLM
Line D: 22-450177-00, O2 @ 7 SLM
Line 14: 22-450175-00, O2 @ 10 SLM
Line 15: 22-450170-00, N2O @ 25 SLM
Line 16: NA
Line 17: NA
Line 18: NA
Line 19: NA
Line 20: NA
Line 21: NA
Line 22: NA
"TEOS LFC 1: LFC,22ML/MIN,AMPDS,TEOS,1/8MVCR,DIGITAL,,
27-377144-00"
"TEOS LFC 2: LFC,2.5ML/MIN,AMPDS,TEOS,1/8MVCR,DIGITAL,
27-367677-00"
MCA sapphire pins: Pins; Sapphire MCA Pins, 15-315136-00
Ring, wafer lift: Carrier; Ring, Ceramic UPR Spindle/Chamber, 15-122178-00
RPC plasma source: Chamber, Plasma only. ASTRON HF, 27-324553-00
RPC distribution:
IR endpoint controller: DETECTOR; SIF4 IREPD VECTOR RPC, 27-450285-00
"SIRF enclosure: 04-324886-00
SIRF Kit, VECTOR Express"
HFRF power supply: N/A(only RPC)
"Servo pin lift: 02-288189-00
ASSY,300MM, LIFT PIN ACTR(not servo)"
Transfer plate: 02-279692-00
Filler plate, station 1: Plate, Filler, Hi-Temp, 15-270984-00
Filler plate, station 2: Plate, Filler, Hi-Temp, 15-270984-00
Filler plate, station 3 & 4: Plate, Filler, Hi-Temp, 15-270984-00
"Double bonded gate: 22-298249-00
(just P/V o-ring, not bonded)"
Inconel chamber screws: no use inconel screw
Gasbox: CESCVD44646A
Baratron 1, process module: MKS 627A11TBC (27-10343-00) 10Torr (Heated)
Baratron 2, process module: MKS 750B13TCE2GK 1000Torr 27-126667-00
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
Specifications
Manufacturer | Novellus Systems Inc. |
Model | VECTOR Express |
Year | 2010 |
Condition | Used |
Stock Number | EM1193 |
WAFER SIZE | 300MM |