Applied Materials Producer GT3 APFe

Applied Materials Producer GT3 APFe

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Description

Applied Materials Producer GT3 APFe PECVD (Chemical Vapor Deposition)

Currently Configured for 300mm wafer size

EQUIPMENT DETAILS:

1. Application

A. 1* Producer GT Patterning Films (APF) System

B. 1* Producer GT3

C. 3* APFe

2. FACTORY INTERFACE OPTIONS

A. 1* Single Axis Aligner

B. 2* Additional Loadport

C. 4* Infopad Pos A or B

D. 4* Configurable Colored Lights

E. 1* Front Facing Intake Plenum

F. 4* Upper E84 Sensors and Cables

G. 4* TIRIS with RF E99 Carrier ID

H. 4* Operator Access Switch

I. 1* Light Curtain

J. 1* Fast Data Gateway Software

3. REMOTE OPTIONS

A. 1* Heat Exchanger Hoses and Manifolds

B. 1* Facilities UPS Interface

C. 1* 17 in Flat Panel with Keyboard on Ergo Arm

D. 1* Remote 17 in Flat Panel on Stand

E. 1* Through the Wall 17 in Flat Panel with Keyboard

4. ADDITIONAL OPTIONS

A. 1* 300mm Htr Leveling and Centering

B. 1* Apex 3000 Calibration Kit

C. 1* Notch Wafer Cal Tool

D. 1* Enhanced Clear Lid (300mm)

E. 1* System Configuration

5. NON STANDARD REQUEST

A. 1 * (300XY A2) GP

B. 1* CERAMIC FX ROBOT BLADE. PRODUCER GT

C. 1* CHAMBER AND FI REMOY AL. PRODUCER GT

6. Power Vaccine

Specifications

ManufacturerApplied Materials
ModelProducer GT3 APFe
ConditionUsed
Stock Numberem1197
WAFER SIZE300mm