2003 Tokyo Electron Ltd. UW200Z

2003 Tokyo Electron Ltd. UW200Z

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Description

Tokyo Electron Ltd. UW200Z

Batch Wafer Processing

Currently Configured for 200mm wafer size

MFG Date: 4/2003

EQUIPMENT DETAILS:

-SD2

-QE2

-POU: HF0.49%, MAE, NH4OH (2:3:100/1:1:20), H2O2 (2:3:100/1:1:20)

- Fire Suppression System

*Missing Parts

Specifications

ManufacturerTokyo Electron Ltd.
ModelUW200Z
Year2003
ConditionUsed
Stock Numberem1210
WAFER SIZE200MM