2004 Brooks Automation, Inc MTX 4020

2004 Brooks Automation, Inc MTX 4020

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Description

Brooks Automation, Inc. MTX 4020 Wafer Sorter

Currently Configured for 300mm wafer size

MFG Date: 2004

EQUIPMENT DETAILS:

Process: SORTER

Missing parts are noted on below tool details

Main Boday

Load Port 1, FIXLOAD V6- missing

Load Port 2, FIXLOAD V6 - missing

Load Port 3, SWIVELLOAD- missing

Load Port 4, SWIVELLOAD- missing

Hander 1

Hander 2 - missing

Hander Controller 1

Hander Controller 2 - missing

Aligner 1- missing

Aligner 2

Wafter ID Reader 1

Wafter ID Reader 2

FFU (Filter Fan Unit)

Computer

Monitor - missing

Keyboard 

Specifications

ManufacturerBrooks Automation, Inc
ModelMTX 4020
Year2004
ConditionUsed
Stock Numberem1243
WAFER SIZE300mm