Thermco 4504 LPCVD Reactor

Thermco 4504 LPCVD Reactor

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Description

Thermco 4504 LPCVD Reactor

Thermco Model 4504 Four Stack LPCVD Reactor configured for PolySi, Silicon

Nitride, SiO2/PSG/BPSG, and TEOS/PTEOS/BPTEOS. System is complete

and in excellent working condition. System is capable of processing wafers

up to 6" in diameter. System is equipped with all SiC paddles and TMX 9000

controllers.

For video presentations of the system in operation copy and paste on your

browser the links below:


http://www.youtube.com/watch?v=zL1rx5Fx5j4 (Preview)


http://www.youtube.com/watch?v=xbmGzHy4XbI (Preview)


http://www.youtube.com/watch?v=ZZAvX6sAUxg (Preview)

Specifications

ManufacturerThermco
Model4504 LPCVD Reactor
ConditionUsed
Stock Numberem1252