EATON NOVA / AXCELIS NV-GSD HE

EATON NOVA / AXCELIS NV-GSD HE

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Description

Configuration


Gas Box:

Gas line #1: HP(Ar) Tylan 2900

Gas line #2: HP (BF3) UNIT 8162

Gas line #3 : SDS PH3 MKS 1640A

Gas line #4: SDS ASH3 MKS 1640A

Isolation transformer type: OIL type


Injector Module:

Source type : ELS / Non-Vaporizer

Extraction electrode type : 3-Axis electrode

Bushing type : Red

P1 Model : Boc Edwards STP-2000C S/N:M697030

RP1 Model: Ebara 40X20 Dry Pump

P8: N/A


Facilities Module:

Machine Transformer Select: Dry type

Triple loops chiller x1:

Affinity CWA-300L-VHE-3LP P/N:10185

S/N:006366


Disk Chiller:

Affinity RWA-012T-BE03CB

P/N:7666 S/N:005752


Compressors X2 :

CTI Cryogenic 9600

S/N:94E980954

CTI Cryogenic 9600


Linac Module:

Injector Faraday : ok

CVA : N/A

P4 Model : Leybold Turbovac 1000C S/N:A961300110

P5 Model: Leybold Turbovac 1000C S/N:A961300107

RP2 Model: Ebara 40X20 Dry Pump

RFG Model : RFG-3000x4ea, RFG-3001x6ea


FEM Module:

FEM Power :EMS:03-165-2-D P/N:00473110 S/N:26N6707

EMS:03-165-2-D P/N:00473110 S/N:27A1493

FEM Guss : P/N:1182890


End Station Module:

IG1/IG3 Contoller: 307 TYPE CONTROLLER

IG3: Ion Gauge Tapy:274012

In-Air Controller Type: 4-Axis DI A19077 Assy No:1520960

Robot Controller Type(Macobot controller): 4-Axis DI A42891 Assy No:1520960

Y-Scan Controller Type: Amplifier P97801092

Gyro Controller Type: 4-Axis DI A06078 Assy No:1520960 P/N:1177580 S/N:113137

Dose Controller Type: Universal B43017 Assy No:152060

Secondly Sun: N/A

RGA:N/A

SMIF:N/A


Disk Module:

P2 Model: CTI Cryogenic OB 8 S/N:J02114998

P3 Model: CTI Cryogenic OB 10 S/N:RC9810276

P9 Model : CTI Cryogenic OB 250F S/N:G02101122

RP4 Model: Ebara 40X20 Dry Pump

Flag Faraday: Standard

E-Shower :N/A

Ar/Xe Bleed MFC: :N/A

In-Vac Arm: ok

Wafer Holder: ok

Gyro: ok

Linear Drive: ok

Disk faraday: OK

Resolver faraday: OK

Disk Model: Si coating S/N:110001741-1486

Rotary Motor Type: belt Drive p/n: 152164

Vacuum Cassette Elevator Type: GRTV TYPE NOT VESPEL X1

Notch/Flat Finder: Notch

Dummy Cassette :1

Load Buffer : 1

Load buffer cassette #2: N/A


E/S Elec Rack / Quad Console Module:

Quad Rack MODULE:1178680

QUADRAPLE Power Supply DI: OK

QUADRAPLE Power SupplyX5: OK

E/S ELEC RACK MODULE:178580

E-Shower P/S: N/A

Cell Controller Model : 133 P/N:1191297

S/N:83871

Ground DI: S/N:P826986

DI POWER CONDITIONER : OK

GYRO CONTROLLER: OK

LOADLOCKCONTROLLER: S/N:0001-140946


Specifications

ManufacturerEATON NOVA / AXCELIS
ModelNV-GSD HE
ConditionUsed
Stock Numbergod220720201
WAFER SIZE200mm