EATON NOVA / AXCELIS GSD HE Implanter

EATON NOVA / AXCELIS GSD HE Implanter

Contact us for price

Available quantity: 1

orCall +353 (0) 87 192 1110

Description

EATON NOVA / AXCELIS GSD HE

Make EATON NOVA / AXCELIS


Model GSD HE


Category Implanters


Quantity 1


Wafer Size 8"


Condition As-Is




Configuration


Gas Box:


Gas line #1: HP(Ar) Tylan 2900


Gas line #2: HP (BF3) UNIT 8162


Gas line #3 : SDS PH3 MKS 1640A


Gas line #4: SDS ASH3 MKS 1640A


Isolation transformer type: OIL type




Injector Module:


Source type : ELS / Non-Vaporizer


Extraction electrode type : 3-Axis electrode


Bushing type : Red


P1 Model : Boc Edwards STP-2000C S/N:M697030


RP1 Model: Ebara 40X20 Dry Pump


P8: N/A




Facilities Module:


Machine Transformer Select: Dry type


Triple loops chiller x1:


Affinity CWA-300L-VHE-3LP P/N:10185


S/N:006366




Disk Chiller:


Affinity RWA-012T-BE03CB


P/N:7666 S/N:005752




Compressors X2 :


CTI Cryogenic 9600


S/N:94E980954


CTI Cryogenic 9600




Linac Module:


Injector Faraday : ok


CVA : N/A


P4 Model : Leybold Turbovac 1000C S/N:A961300110


P5 Model: Leybold Turbovac 1000C S/N:A961300107


RP2 Model: Ebara 40X20 Dry Pump


RFG Model : RFG-3000x4ea, RFG-3001x6ea




FEM Module:


FEM Power :EMS:03-165-2-D P/N:00473110 S/N:26N6707


EMS:03-165-2-D P/N:00473110 S/N:27A1493


FEM Guss : P/N:1182890




End Station Module:


IG1/IG3 Contoller: 307 TYPE CONTROLLER


IG3: Ion Gauge Tapy:274012


In-Air Controller Type: 4-Axis DI A19077 Assy No:1520960


Robot Controller Type(Macobot controller): 4-Axis DI A42891 Assy No:1520960


Y-Scan Controller Type: Amplifier P97801092


Gyro Controller Type: 4-Axis DI A06078 Assy No:1520960 P/N:1177580 S/N:113137


Dose Controller Type: Universal B43017 Assy No:152060


Secondly Sun: N/A


RGA:N/A


SMIF:N/A




Disk Module:


P2 Model: CTI Cryogenic OB 8 S/N:J02114998


P3 Model: CTI Cryogenic OB 10 S/N:RC9810276


P9 Model : CTI Cryogenic OB 250F S/N:G02101122


RP4 Model: Ebara 40X20 Dry Pump


Flag Faraday: Standard


E-Shower :N/A


Ar/Xe Bleed MFC: :N/A


In-Vac Arm: ok


Wafer Holder: ok


Gyro: ok


Linear Drive: ok


Disk faraday: OK


Resolver faraday: OK


Disk Model: Si coating S/N:110001741-1486


Rotary Motor Type: belt Drive p/n: 152164


Vacuum Cassette Elevator Type: GRTV TYPE NOT VESPEL X1


Notch/Flat Finder: Notch


Dummy Cassette :1


Load Buffer : 1


Load buffer cassette #2: N/A




E/S Elec Rack / Quad Console Module:


Quad Rack MODULE:1178680


QUADRAPLE Power Supply DI: OK


QUADRAPLE Power SupplyX5: OK


E/S ELEC RACK MODULE:178580


E-Shower P/S: N/A


Cell Controller Model : 133 P/N:1191297


Ground DI: S/N:P826986


DI POWER CONDITIONER : OK


GYRO CONTROLLER: OK


LOADLOCKCONTROLLER:

Specifications

ManufacturerEATON NOVA / AXCELIS
ModelGSD HE Implanter
ConditionUsed
Stock Numberem1535
WAFER SIZE8"