SC Fluids CPD 1100 Supercritical CO2 dryer

Supercritical CO2 dryer for MEMS devices, CPD 1100 series

Double walled stainless steel process chamber with motorized clamping mechanism and auto lid lifter

  Max pressure rating 1600psig (110bar)

  Max temperature 150F(65C)

  Process single wafers up to 150 mm diameter and 5.0 mm high

ultraclean CO2 delivery system, point of use (<.003u) particle filter

recirculating heater bath

solvent separator and water heater 

inlet valve system consists of high purity valves and electropolished orbital welded stainless tubing

PLC controller stores up to 10 process recipes

Facility requirements:

compressed air: clean, dry, and filtered

water: min 1gpm at 15-45psi

Liquid CO2 SFC or SFE grade with He head of 2000psi and educator tube