Samco RIE-1C

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Description

Samco RIE-1C parallel plate reactive ion etching system

Parallel plate reactive ion etcher, cathode coupled

upper Anode: Aluminum, 140mm diameter, showerhead

lower Cathode: stainless steel, 120mm diameter, water cooled

200mm diameter quartz chamber x 62mm high

viewing port

13.56mhz 500w ENI power supply

manual matching network

Edwards E2M12 vacuum pump

2 gas inlet lines with rotameters, 50 SCCM for CF4 and O2, one N2 purge line

process timer

fully auto operation of vacuum sysem, valves, and RF

operation and maintenance manuals included

Specifications

ManufacturerSamco
ModelRIE-1C
ConditionUsed
Stock NumberEM937