MRL Industries Bandit 218 LPCVD Furnace

200mm LPCVD furnace

tube 1: TEOS/anneal

tube 2:Nitride/poly, gas connections: air low N2, N2, FG1, Ar, O2, SiH2Cl2(DCS), SiH4, NH3

2 Kashiyama vacuum pumps with blowers

Schumacher M-Dot dopant source controller

furnace dims: 66x36x78

gas module dims: 18x36x78

power req: 480v, 250amps max

complete specifications upon request