Axcelis Gemini GPL Plasma Asher

Axcelis Gemini GPL Plasma Asher

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Description

Axcelis Gemini GPL Plasma Asher


200mm

Palletized and banded/wrapped

Pulled from the fab in operational condition – no known parts missing.

Decontaminated after de-installation

2 QDP-80 pumps included. No booster pumps included. Both have been decontaminated.

Some misc parts included also but not inventoried.  

Specifications

ManufacturerAxcelis
ModelGemini GPL
ConditionUsed
Stock Numberem2293