TEL TOKYO ELECTRON α-8S-Z Pyro Vertical Furnace

TEL TOKYO ELECTRON α-8S-Z Pyro Vertical Furnace

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Description

Configuration

OEM:TOKYO ELECTRON

MODEL:α-8S-Z

MAIN CTR:WAVES

VINTAGE:1999

PROCESS:PYRO

WAFER SIZE:200 mm SNIF

GAS:N2/O2/H2/HCL

HEATER:VOS-40-107(FTP)

Specifications

ManufacturerTEL TOKYO ELECTRON
Modelα-8S-Z
Year1999
ConditionUsed
Stock NumberGOD041020201
WAFER SIZE200mm