Zeiss/HSEB Axiosprint Automated Wafer Inspection Tool

Zeiss/HSEB Axiosprint Automated Wafer Inspection Tool

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Description

Automated inspection station with Zeiss Axiotron 2 microscope (photo2) for 150mm-200mm wafers,


dual cassette handling


optical noncontact prealigner for wafers with notches or flats


active anti-vibration platform


macro/backside inspection station with 30 degree tilt (photo3), 6-40rpm rotation


Zeiss KL1500 LCD cold light fiber optic source with bifurcated light pipe for wafer front side inspection


BF/DF/DIC/confocal uv-vis observation modes


throughput up to 400wph


Zeiss microscope includes UV-vis confocal scan module


Epi-Neofluor 5x/10x/20x/50x/100x HD DIC objectives with Nomarski sliders


motorized analyzer


motorized focus drive


Sony camera and color monitor


dual tungsten halogen and mercury lamphouses with beam switcher


autofocus module


motorized objective rotation with keypad


200mm x 200mm scanning stage with glass scales 


motorized rotating vacuum chuck


Windows NT PC with Quickview application software


CSM module with UV illumination (365nm) allows inspection of wafers with features as small as 0.13um


115/230v, 47-63hz


2 units available

Specifications

ManufacturerZeiss/HSEB
ModelAxiosprint Automated Wafer Inspection Tool
ConditionUsed
Stock Numberem2393