FSI Polaris 2100 coater/developer
FSI Polaris 2100 coater/developer
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Description
- Single robot cluster tool
- 2 coat units, 3 develop units,
- 2 HMDS,
- 6 hot plates and
- 6 chill plates.
- It is currently de-installed. It was operational at the time of de-install, but may need some maintenance to get it running.
- Comes with over $300K of spares
Specifications
| Manufacturer | FSI Polaris |
| Model | 2100 |
| Year | 2008 |
| Condition | Used |
| Stock Number | GOD04012021 |