FSI Polaris 2100 coater/developer

FSI Polaris 2100 coater/developer

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Description

  • Single robot cluster tool
  • 2 coat units, 3 develop units,
  • 2 HMDS,
  • 6 hot plates and
  • 6 chill plates. 
  • It is currently de-installed. It was operational at the time of de-install, but may need some maintenance to get it running.
  • Comes with over $300K of spares

Specifications

ManufacturerFSI Polaris
Model2100
Year2008
ConditionUsed
Stock NumberGOD04012021