1997 LAM Research TCP 9600CFE Metal Etch

Install Type is Stand Alone.

Wafer Size:200mm

Off-Line date is FEB 2020.

All cables are present.

Handler Type is auto loader.

Robot Type is EQUIP.

End-Effecter Type is standard.

Pre-Aligner is including.

System SW(OS) version is WINDOWS NT.

System SW(APP) version is 825-10494-472-E7.

No SW Options.

SEMI Std Options is E84.

The supporting equipment include the AC Dist Box.

The chuck is ESC type.

The equipment include DSQ chamber.