1997 LAM Research TCP 9600CFE Metal Etch

1997 LAM Research TCP 9600CFE Metal Etch

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Available quantity: 1

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Install Type is Stand Alone.

Wafer Size:200mm

Off-Line date is FEB 2020.

All cables are present.

Handler Type is auto loader.

Robot Type is EQUIP.

End-Effecter Type is standard.

Pre-Aligner is including.

System SW(OS) version is WINDOWS NT.

System SW(APP) version is 825-10494-472-E7.

No SW Options.

SEMI Std Options is E84.

The supporting equipment include the AC Dist Box.

The chuck is ESC type.

The equipment include DSQ chamber.


ManufacturerLAM Research
ModelTCP 9600CFE Metal Etch
Stock NumberOD11121