Axcelis Gemini GPL MCU202

Axcelis Gemini GPL MCU202

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Description

Complete


Monitors missing, but will be replaced as part of the sale


2 Process Chamber:

Quartz tubes

2KW Magnetron

Lamp Heated

2x Temperature Controllers

3 MFC's/ Chamber


380VAC/50Hz Uitvoering


1 Robot 3 Axis

1 Cooling Station

2 Cassette Stations


Specifications

ManufacturerAxcelis
ModelGemini GPL MCU202
ConditionUsed
Stock NumberGOD13012020