2002 Accent Optical Caliper Q300, Biorad, 300mm, Overlay Measurement

2002 Accent Optical Caliper Q300, Biorad, 300mm, Overlay Measurement

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Description

Robotic pick and place wafer transport with two FOUPs

Optics module with variable magnification

High Resolution X,Y,Z & Theta Stage sortware controlled incorporating DSF Autofocus

Programmable Bandwidth Illumination system

Automated Pattern Recognition

Vibration Isolation Table

Fully I300I && GEM/MSEM compliant

GUI and Analysis package running under Lenux

Unhooked 966-1 (unopened from Fishkill)

Specifications

ManufacturerAccent Optical
ModelCaliper Q300, Biorad, 300mm, Overlay Measurement
Year2002
ConditionUsed
Stock NumberBM132