2004 LAM Alliance (A6) TCP 9600PTX

2004 LAM Alliance (A6) TCP 9600PTX

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Description

Metal Etch

Etch/Ash/Clean - Plasma Processing

Date of Manufacture: 2004-01-01

Currently Configured for: 200mm

Alliance A6 Platform

x2 9600PTX Chambers

x2 Microwave Strip Chambers

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Specifications

ManufacturerLAM
ModelAlliance (A6) TCP 9600PTX
Year2004
ConditionUsed
Stock NumberMBM27