AMAT Electrostatic chucks PN 0010-16858

AMAT Electrostatic chucks PN 0010-16858

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Description

Refurbished condition


Test Results


Wafer size: 12" standard

Type: bipolar


Helium leak rate at operating voltage: 500Vdc

Backside Pressure: Helium Leak Rate:

4 torr 0.3sccm

6 torr 0.4sccm

8 torr 0.5sccm

Maximum pressure: >12 torr

Residual pressure: <5 torr

Leakage current at 800 Vdc: <1mA


Specifications

ManufacturerAMAT
ModelElectrostatic chucks PN 0010-16858
ConditionRefurbished
Stock NumberBM516