AMAT Electrostatic chucks PN 0010-16858

Refurbished condition

5 AMAT Electrostatic chucks PN 001-16858. All have received the below refurb from Invax technologies in California.

Refurbish Option 3 - Replace Dielectric & MCA Pads Option 3 refurbish is typically required when ESC has dielectric breakdown. Item Description Unit Price 3. Option 3 - Refurbish process includes: $ 22,550 o De-contaminate part o Clean to ‘as new’ condition o Remove failed dielectric o Remove failed HV/RF electrodes, as necessary o Machine ceramic to remove/minimize chips and restore critical dimensions. o Deposit new HV/RF electrodes o Apply new dielectric o Apply new MCA pads o Helium leak check assembly o Perform full functional tests under simulated process conditions.

Test Results

Wafer size: 12" standard

Type: bipolar

Helium leak rate at operating voltage: 500Vdc

Backside Pressure: Helium Leak Rate:

4 torr 0.3sccm

6 torr 0.4sccm

8 torr 0.5sccm

Maximum pressure: >12 torr

Residual pressure: <5 torr

Leakage current at 800 Vdc: <1mA