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2000 TEL Tel act 8 coater/Developer
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2 Coater 2 Developer Currently 4 Inch set up
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AMAT AMAT Applied Materials 0010-11228 PVD Magnet LP-3.7.3 300mm Endura New
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Tokyo Electron TEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 No End Effector
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NIKON Nikon 4G746-090 AIS/BFP Plate NSR-S306C DUV
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NIKON Nikon 4G746-103-2 AIS/BFP Plate NSR System Used Working
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Deublin/Applide Materials Deublin 20212-200 Rotary Union Sputter AMAT Applied Materials 0190-13851
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Edwards STP STP-A1603PV Edwards B751-00-030 Turbomolecular Pump Turbo
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SMC SMC INR-496-002D-X007 Recirculating Thermo Chiller
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Kawasaki Kawasaki 3NT420B-B029 300mm Dual Blade Wafer Transfer Robot Broken End Effector
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KAWASAKI Kawasaki C60C-A001 Robot Controller Nikon 4S082-666-2 NKWH00V1.11 NSR
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Kawasaki Kawasaki C60C-A001 Robot Controller Nikon 4S082-666-2 WHK00V1.11 NSR
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NIKON Nikon 4S065-784 RX/RY TRM Amplifier CLSR-0102B-N2CA 4S013-684-1 NSR
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