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1995 KLA-Tencor Surfscan 6200
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Type: Wafer Surface Analysis System
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2010 DISCO DFL 7160 Laser Saw
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Vintage : 2010 Complete Laser Head lasts 18,000 hours Can cut SIC
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AMAT AMAT 0090-91619 IMPLANT 4F OPTIONS CHASSIS CONTROL, 0090-91619ITL
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Mattson AE RF30S RF
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VARIAN E11058260
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LAM LAM 853-443014-112 Assy, FR/CA. PM, 4520XL, A6, CE, Alliance 4520, Etch, 115512
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Mitutoyo FS110
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FST FST FSTC-CD4040M Temperature Control Unit, Chiller, 3 Phase, AC208V,
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Semiconductor Diagnostics SDI 210 423274
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LAM 451121
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JEOL Jeol JWS-7700 Wafer Inspection System, WS-75BU, WS-70LCKT/15M,
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IPEC IPEC Avanti 372M CMP, 200mm wafers Chemical Mechanical Polisher tool
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