1998 Hitachi S-8820 CD-SEM

Measuring size: 0.1-10µm (was used with somewhat reduced precision up to 30µm)

SECS/GEM: is installed, S6F9/S2F17/S2F18 have been used

Objective lens: thin aperture with heater, electromagnetic condenser and FCM objective lens system

Voltage: 700-1300V

CCD Camera: optical field of view 1.2 x 1.2mm. black/white image

SW Version: System 15.27, Host 15.26, SEM 15.27, IPS 15.27 (4400), Stage 2.13, Evac 1.06, HV 3.00, WT 2.03

OS: HP-UX

Load port, SMIF or Cassette?: open Cassette, 2 ports, no slot mapping