ELECTROTECH PECVD DEP SiN-SiC (Sio2) Wafer Size: 6 Inch Gases Used: CF4-O2-Ar-N2-N2O-SiH4-NH3-5%S...

FILTER FAN UNIT FC5-A

MGE UPS SYSTEM

SINGLE PHASE INDUCTION MOTOR

PRESSURE GAGE

SOURSE MODE SWITCH

SETUP CUP CONTROL

TRANSFORMER

TEMP MONITOR

DC POWER SUPPLY

HEAT EXCHANGER

RDAC ASSY