2011 TEL LITHIUS PRO V

Tool Status Connected

Wafer Size 300 mm

Fab Section Lithography 

Vintage 2011

Asset Description LITHIUS PRO V 193nm Immersion Coater/Developer

Software Version 1.00.54

CIM SECS GEM

Process 193nm Immersion

Main System BCT BARC coaters 4

Main System CPRP 12

Main System CSWP 12

Main System CHHA 5

Main System BWEE 1

Main System CADH 4

Main System WEE 1

Main System Coaters 4

Handler System MPRA 2

Handler System PRAI 1

Handler System PRA 4

Options System WISC 1 

Chemical cabinets (Solvent, Developer) 2

Shinwa T&H 1

Fire Suppression 1

Power Box 1

Missing/ Faulty Parts/ Accessories List

Fire Suppression (The N2 tank/head will not be shipped) 1